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College of Engineering & Science - Louisiana Tech University


Engineering & Technology Management

Fundamentals of Microfabrication Processes

MSE -501 FUND OF MICROFABRICATION PROCESS
College: College of Engineering and Science
Department: Nanosystems Engineering
Credits: 3.00

FUNDAMENTALS OF MICROFABRICATION PROCESSES. 0-3-3. Study of microfabrication processes including patterning, additive, and etching processes used for the realization of microelectronic ultra large-scale integration (ULSI) and microelectromechanical systems (MEMS) technologies.

 

MSE 501 Syllabus


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