Fundamentals of Microfabrication Processes
MSE -501 FUND OF MICROFABRICATION PROCESS
College: College of Engineering and Science
Department: Nanosystems Engineering
FUNDAMENTALS OF MICROFABRICATION PROCESSES. 0-3-3. Study of microfabrication processes including patterning, additive, and etching processes used for the realization of microelectronic ultra large-scale integration (ULSI) and microelectromechanical systems (MEMS) technologies.